A high-frequency comb-actuated resonant MEMS scanner for microdisplays

Autor:	Hakan Urey, Wyatt O. Davis, Dean R. Brown, Sertan Kutal Gokce, Sven Holmstrom
Rok vydání:	2011
Předmět:	Microelectromechanical systems Frequency comb Frequency response Scanner Materials science Optics Atmospheric pressure business.industry Comb drive Resonance High resolution Optoelectronics business
Zdroj:	16th International Conference on Optical MEMS and Nanophotonics.
DOI:	10.1109/omems.2011.6031064
Popis:	A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::98706c8aba516e14caaf581a92ab66a4 https://doi.org/10.1109/omems.2011.6031064 Zobrazit plný text záznamu