Silicide formation in Co/Si system investigated by depth-resolved positron annihilation and X-ray diffraction

Autor: G. Venugopal Rao, S. Kalavathi, S. Abhaya, G. Amarendra, V.S. Sastry
Rok vydání: 2006
Předmět:
Zdroj: Surface Science. 600:2762-2765
ISSN: 0039-6028
DOI: 10.1016/j.susc.2006.04.043
Popis: The transformation of Co/Si to CoSi 2 /Si in the temperature range of 300–1170 K has been investigated using depth-resolved positron annihilation and Glancing incidence X-ray diffraction (GIXRD). The different silicide phases formed are identified from the experimental positron annihilation characteristics, which are consistent with the GIXRD results. The present study clearly indicates the absence of vacancy defects in the silicide overlayer.
Databáze: OpenAIRE