Synthesis of Diamond from a High-Velocity Microwave Plasma Flow
Autor: | A. A. Emel’yanov, M. Yu. Plotnikov, I. B. Yudin, A. K. Rebrov, N. I. Timoshenko |
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Rok vydání: | 2020 |
Předmět: |
Jet (fluid)
Materials science Hydrogen Flow (psychology) Computational Mechanics Analytical chemistry General Physics and Astronomy chemistry.chemical_element Diamond 02 engineering and technology Substrate (electronics) engineering.material 01 natural sciences Ion source Methane 010305 fluids & plasmas chemistry.chemical_compound 020303 mechanical engineering & transports 0203 mechanical engineering chemistry Mechanics of Materials 0103 physical sciences engineering Order of magnitude |
Zdroj: | Doklady Physics. 65:23-25 |
ISSN: | 1562-6903 1028-3358 |
DOI: | 10.1134/s1028335820010127 |
Popis: | A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 μm/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma. |
Databáze: | OpenAIRE |
Externí odkaz: | |
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Abstrakt: | A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 μm/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma. |
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ISSN: | 15626903 10283358 |
DOI: | 10.1134/s1028335820010127 |