Synthesis of Diamond from a High-Velocity Microwave Plasma Flow

Autor: A. A. Emel’yanov, M. Yu. Plotnikov, I. B. Yudin, A. K. Rebrov, N. I. Timoshenko
Rok vydání: 2020
Předmět:
Zdroj: Doklady Physics. 65:23-25
ISSN: 1562-6903
1028-3358
DOI: 10.1134/s1028335820010127
Popis: A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 μm/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma.
Databáze: OpenAIRE
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Popis
Abstrakt:A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 μm/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma.
ISSN:15626903
10283358
DOI:10.1134/s1028335820010127