Synthesis of Diamond from a High-Velocity Microwave Plasma Flow

Autor:	A. A. Emel’yanov, M. Yu. Plotnikov, I. B. Yudin, A. K. Rebrov, N. I. Timoshenko
Rok vydání:	2020
Předmět:	Jet (fluid) Materials science Hydrogen Flow (psychology) Computational Mechanics Analytical chemistry General Physics and Astronomy chemistry.chemical_element Diamond 02 engineering and technology Substrate (electronics) engineering.material 01 natural sciences Ion source Methane 010305 fluids & plasmas chemistry.chemical_compound 020303 mechanical engineering & transports 0203 mechanical engineering chemistry Mechanics of Materials 0103 physical sciences engineering Order of magnitude
Zdroj:	Doklady Physics. 65:23-25
ISSN:	1562-6903 1028-3358
DOI:	10.1134/s1028335820010127
Popis:	A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 μm/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6c2183ddf3d4e26fddafe04c4934303c https://doi.org/10.1134/s1028335820010127 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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