Characterization of Strain Relaxation Process during Ge Condensation by Synchrotron Microbeam X-ray Diffraction

Autor: Yasuhiko Imai, Shigeru Kimura, Osami Sakata, Tomoyuki Inoue, Takayoshi Shimura, Daisuke Shimokawa, Takuji Hosoi, Heiji Watanabe
Rok vydání: 2008
Předmět:
Zdroj: Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials.
DOI: 10.7567/ssdm.2008.p-1-21l
Databáze: OpenAIRE