| Autor: |
Renata F. Witman, Anatoly V. Shturbin, V.Yu. Panevin, I. E. Titkov, Leonid E. Vorobjev |
| Rok vydání: |
2000 |
| Předmět: |
|
| Zdroj: |
Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505). |
| DOI: |
10.1109/cleoe.2000.910130 |
| Popis: |
Summary form only given. A simple non-destructive method for characterising SiC samples (Lely-crystals, CREE-substrates, and epitaxial films) is presented. The observed ultraviolet differential reflection spectra of SiC samples were compared with a pure Lely-crystal (model sample) to estimate the structural quality of the sample. The method presented is based on a differential study of ultraviolet reflection spectra of SiC films in comparison with a perfect Lely-crystal. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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