Plasma treatment for chemical SiOx enables excellent passivation of p-type polysilicon passivating contact featuring the lowest J of ∼6 fA/cm2

Autor: Haiyang Xing, Zunke Liu, Zhenhai Yang, Mingdun Liao, Qinqin Wu, Na Lin, Wei Liu, Chuanfan Ding, Yuheng Zeng, Baojie Yan, Jichun Ye
Rok vydání: 2023
Předmět:
Zdroj: Solar Energy Materials and Solar Cells. 257:112354
ISSN: 0927-0248
DOI: 10.1016/j.solmat.2023.112354
Databáze: OpenAIRE