Autor: |
M. Rennau, Stefan E. Schulz, Thomas Gessner, Holger Fiedler, Sascha Hermann |
Rok vydání: |
2014 |
Předmět: |
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Zdroj: |
IEEE International Interconnect Technology Conference. |
DOI: |
10.1109/iitc.2014.6831852 |
Popis: |
We prepared CNT based vias on wafer scale. Based on the electrical characterization we extracted the localization length of the CNTs. While for short CNTs the classical transport regime is valid, the Anderson localization regime applies for longer CNTs. Supplementary the characteristic length scales were estimated based on the structure of the CNTs being in good agreement with the parameters extracted from the electrical measurements. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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