| Autor: |
Nicholas H. Tripsas, R. Johnson |
| Rok vydání: |
2002 |
| Předmět: |
|
| Zdroj: |
Proceedings of 11th International Conference on Ion Implantation Technology. |
| DOI: |
10.1109/iit.1996.586416 |
| Popis: |
Process qualifications are required as new equipment is added to a fab to ensure good product quality. For Ion Implanters, dose-matching of machines is a necessary first step in this procedure. Split-lot qualifications are also commonly run prior to releasing a new machine to production. The design of these experiments is crucial to efficient qualification. The use of a fractional factorial design ensures that a lot is split differently at each implant layer. Statistical analysis can independently check each implant for significant differences in electrical parameters. These methods have many advantages over more traditional approaches. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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