Experimental design for equipment qualification and matching

Autor:	Nicholas H. Tripsas, R. Johnson
Rok vydání:	2002
Předmět:	Matching (statistics) Computer science Process (engineering) Design of experiments media_common.quotation_subject Equipment Qualification Fractional factorial design Production (economics) Quality (business) Layer (object-oriented design) media_common Reliability engineering
Zdroj:	Proceedings of 11th International Conference on Ion Implantation Technology.
DOI:	10.1109/iit.1996.586416
Popis:	Process qualifications are required as new equipment is added to a fab to ensure good product quality. For Ion Implanters, dose-matching of machines is a necessary first step in this procedure. Split-lot qualifications are also commonly run prior to releasing a new machine to production. The design of these experiments is crucial to efficient qualification. The use of a fractional factorial design ensures that a lot is split differently at each implant layer. Statistical analysis can independently check each implant for significant differences in electrical parameters. These methods have many advantages over more traditional approaches.
Databáze:	OpenAIRE
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