PHOTOACOUSTIC DETECTION METHODS FOR CHARACTERIZING LASER IRRADIATION AND RECRYSTALLIZATION OF SEMICONDUCTORS

Autor:	J. F. McClelland, R. N. Kniseley
Rok vydání:	1980
Předmět:	Photoacoustic effect Materials science Annealing (metallurgy) business.industry Metallurgy Recrystallization (metallurgy) equipment and supplies Laser Semimetal law.invention Ion implantation Semiconductor law Optoelectronics sense organs Irradiation business
DOI:	10.1016/b978-0-12-746850-1.50032-3
Popis:	The use of photoacoustic detection is discussed as a technique for monitoring laser heating and for characterizing implantation and recrystallization of semiconductors via optical absorption. Preliminary results are reported for laser heating of Ge. A method is proposed for signal processing to enable measurement of optical absorption coefficient changes due to implantation and recrystallization without a background signal from the unimplanted region of the semiconductor.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1db144e790a8550acab623d0bf189a9b https://doi.org/10.1016/b978-0-12-746850-1.50032-3 Zobrazit plný text záznamu