Interferometer for multi-degree-of-freedom measurement using ball lens and liquid crystal

Autor:	Kota Ishii, Ryoshu Furutani
Rok vydání:	2022
Zdroj:	2022 8th International Conference on Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (Nanoman-AETS).
DOI:	10.1109/nanoman-aets56035.2022.10119523
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::140fbb95f7de44e610691833a56ca691 https://doi.org/10.1109/nanoman-aets56035.2022.10119523 Zobrazit plný text záznamu