Interferometer for multi-degree-of-freedom measurement using ball lens and liquid crystal
| Autor: | Kota Ishii, Ryoshu Furutani |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 8th International Conference on Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (Nanoman-AETS). |
| DOI: | 10.1109/nanoman-aets56035.2022.10119523 |
| Databáze: | OpenAIRE |
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