Low Power Electromagnetic Scanning Micromirror for LiDAR System
| Autor: | Jeong-Yeon Hwang, Chang-Hyeon Ji, Jong-Uk Bu |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | IEEE Sensors Journal. 21:7358-7366 |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2020.3048710 |
| Popis: | In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed under the silicon substrate. A unique magnetic circuit that generates an asymmetric radial magnetic field has been designed and analyzed. A series-connected double spring-mass system consisting of a gimbal and a mirror plate has been used to amplify the deflection angle. An analytic model of the system has been developed and verified with finite element analysis. Also, a reinforcement rim structure is utilized to reduce the dynamic deformation of the reflective surface down to 19.3 nmrms. An optical scan angle of 30° is obtained at 690 Hz, 17.4 mArms input, and corresponding power consumption is 7.8 mWrms. A prototype scanning system with $180^{\circ } \times 30^{\circ }$ field-of-view has been demonstrated with fabricated scanning micromirror as the vertical scanner. The proposed approach provides a simple and compact design for a large diameter scanning micromirror, which can potentially be utilized in various LiDAR applications. |
| Databáze: | OpenAIRE |
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