Impact of oxygen on CVD grown boron nitride layers
Autor: | Malik, Mohammad Wasil, Wang, Bin, Jaddi, Sahar, Yiyi Yan, Reis, Victor, Zeng, Yun, Thomas Pardoen, Hackens, Benoît, Raskin, Jean-Pierre |
---|---|
Přispěvatelé: | UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique, UCL - SST/IMMC/IMAP - Materials and process engineering |
Zdroj: | DIAL |
Databáze: | OpenAIRE |
Externí odkaz: |