Impact of oxygen on CVD grown boron nitride layers

Autor: Malik, Mohammad Wasil, Wang, Bin, Jaddi, Sahar, Yiyi Yan, Reis, Victor, Zeng, Yun, Thomas Pardoen, Hackens, Benoît, Raskin, Jean-Pierre
Přispěvatelé: UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique, UCL - SST/IMMC/IMAP - Materials and process engineering
Zdroj: DIAL
Databáze: OpenAIRE