193 nm scatterfield microscope illumination optics
Autor: | Figueiro, Mariana, Lerner, Scott, Muschaweck, Julius, Rogers, John, Sohn, Martin Y., Silver, Richard M. |
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Zdroj: | Proceedings of SPIE; December 2014, Vol. 9293 Issue: 1 p92931D-92931D-6, 836386p |
Databáze: | Supplemental Index |
Externí odkaz: |