193 nm scatterfield microscope illumination optics

Autor: Figueiro, Mariana, Lerner, Scott, Muschaweck, Julius, Rogers, John, Sohn, Martin Y., Silver, Richard M.
Zdroj: Proceedings of SPIE; December 2014, Vol. 9293 Issue: 1 p92931D-92931D-6, 836386p
Databáze: Supplemental Index