Talbot lithography as an alternative for contact lithography for submicron features
| Autor: | von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C., Dunbar, L. A., Nguyen, D., Timotijevic, B., Vogler, U., Veseli, S., Bergonzi, G., Angeloni, S., Bramati, A., Voelkel, R., Stanley, R. P. |
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| Zdroj: | Proceedings of SPIE; March 2014, Vol. 8974 Issue: 1 p89740F-89740F-8, 807669p |
| Databáze: | Supplemental Index |
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