Residual stress determination in PECVD TiN coatings by X-ray diffraction: a parametric study
| Autor: | Thomsen, N. B., Horsewell, A., Mogensen, K. S., Eskildsen, S. S., Mathiasen, C., Boettiger, J. |
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| Zdroj: | Thin Solid Films; 1998, Vol. 333 Issue: 1 p50-59, 10p |
| Databáze: | Supplemental Index |
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