Transfer of structured and patterned thin silicon films using the Smart-Cut® process.
| Autor: | Aspar, B., Bruel, M., Zussy, M., Cartier, A.M. |
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| Zdroj: | Electronics Letters (Institution of Engineering & Technology); 10/10/1996, Vol. 32 Issue 21, p1985-1986, 2p |
| Databáze: | Complementary Index |
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