Numerical analysis of pull-in voltage in contact MEMS switch with double actuated electrodes.
Autor: | Ling Jiang, Yanling Shi, Yun Liu, Zheng Ren, Yanfang Ding, Zongsheng Lai, Ziqiang Zhu |
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Zdroj: | Proceedings 7th International Conference on Solid-State & Integrated Circuits Technology, 2004; 2004, p1919-1919, 1p |
Databáze: | Complementary Index |
Externí odkaz: |