Numerical analysis of pull-in voltage in contact MEMS switch with double actuated electrodes.

Autor: Ling Jiang, Yanling Shi, Yun Liu, Zheng Ren, Yanfang Ding, Zongsheng Lai, Ziqiang Zhu
Zdroj: Proceedings 7th International Conference on Solid-State & Integrated Circuits Technology, 2004; 2004, p1919-1919, 1p
Databáze: Complementary Index