Application of laser annealing in the EU FP6 project D-DotFET.

Autor: Nanver, L.K., Jovanovic, V., Biasotto, C., van der Cingel, J., Milosavljevic, S.
Zdroj: 2009 17th International Conference on Advanced Thermal Processing of Semiconductors; 2009, p1-7, 7p
Databáze: Complementary Index