Application of laser annealing in the EU FP6 project D-DotFET.
Autor: | Nanver, L.K., Jovanovic, V., Biasotto, C., van der Cingel, J., Milosavljevic, S. |
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Zdroj: | 2009 17th International Conference on Advanced Thermal Processing of Semiconductors; 2009, p1-7, 7p |
Databáze: | Complementary Index |
Externí odkaz: |