Anomalous Sb redistribution during the preparation of delta-doping layers in silicon.
| Autor: | Slijkerman, W. F. J., Zagwijn, P. M., van der Veen, J. F., van de Walle, G. F. A., Gravesteijn, D. J. |
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| Zdroj: | Journal of Applied Physics; 8/15/1991, Vol. 70 Issue 4, p2111, 6p |
| Abstrakt: | Presents a study which investigated antimony segregation at the moving crystal-amorphous silicon (001) interface during preparation of antimony delta-doping layers. Background on delta-doping layers; Experimental procedures and results; Conclusions. |
| Databáze: | Complementary Index |
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