Wavefront aberration measurement in 157-nm high numerical aperture lens.
| Autor: | Kim, Jaehwan, Suganaga, Toshifumi, Watanabe, Kunio, Kanda, Noriyoshi, Itani, Toshiro, Cashmore, Julian S., Gower, Malcolm C. |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p1408-1419, 12p |
| Databáze: | Complementary Index |
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