Grating fabrication through x-ray lithography.
Autor: | Mouroulis, Pantazis Z., Hartley, Frank T., Muller, Richard E., Wilson, Daniel W., Shori, Aidan, Feldman, Martin, Jiang, Li, Christenson, Todd R. |
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Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p108-114, 7p |
Databáze: | Complementary Index |
Externí odkaz: |