Grating fabrication through x-ray lithography.

Autor: Mouroulis, Pantazis Z., Hartley, Frank T., Muller, Richard E., Wilson, Daniel W., Shori, Aidan, Feldman, Martin, Jiang, Li, Christenson, Todd R.
Zdroj: Proceedings of SPIE; Nov2003, Issue 1, p108-114, 7p
Databáze: Complementary Index