Electron-beam-deposited Mo/Si and MoxSiy/Si multilayer x-ray mirrors and gratings.
Autor: | Schmiedeskamp, Bernt, Kloidt, Andreas, Stock, Hans-Jürgen, Kleineberg, Ulf, Döhring, Thorsten, Pröpper, Michael, Rahn, Steffen, Hilgers, Kerstin, Heidemann, Bernhard, Tappe, Thorsten, Heinzmann, Ulrich, Krumrey, Michael K., Müller, Peter, Schoize, Frank, Heidemann, Klaus F. |
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Zdroj: | Optical Engineering; Apr1994, Vol. 33 Issue 4, p1314-1321, 8p |
Databáze: | Complementary Index |
Externí odkaz: |