Electron-beam-deposited Mo/Si and MoxSiy/Si multilayer x-ray mirrors and gratings.

Autor: Schmiedeskamp, Bernt, Kloidt, Andreas, Stock, Hans-Jürgen, Kleineberg, Ulf, Döhring, Thorsten, Pröpper, Michael, Rahn, Steffen, Hilgers, Kerstin, Heidemann, Bernhard, Tappe, Thorsten, Heinzmann, Ulrich, Krumrey, Michael K., Müller, Peter, Schoize, Frank, Heidemann, Klaus F.
Zdroj: Optical Engineering; Apr1994, Vol. 33 Issue 4, p1314-1321, 8p
Databáze: Complementary Index