Deposition and characterization of ZnO thin film for FET with back gate biasing-based biosensors application.

Autor: Fathil, M. F. M., Arshad, M. K. Md, Hashim, U., Ruslinda, A. R, Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Foo, K. L, Adzhri, R., Nuzaihan, M. N. M., Azman, A. H., Zaki, M.
Zdroj: 2015 IEEE Regional Symposium on Micro & Nanoelectronics (RSM); 2015, p1-4, 4p
Databáze: Complementary Index