Deposition and characterization of ZnO thin film for FET with back gate biasing-based biosensors application.
Autor: | Fathil, M. F. M., Arshad, M. K. Md, Hashim, U., Ruslinda, A. R, Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Foo, K. L, Adzhri, R., Nuzaihan, M. N. M., Azman, A. H., Zaki, M. |
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Zdroj: | 2015 IEEE Regional Symposium on Micro & Nanoelectronics (RSM); 2015, p1-4, 4p |
Databáze: | Complementary Index |
Externí odkaz: |