Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source.

Autor: Kurashima, Yuichi1 (AUTHOR) y-kurashima@aist.go.jp, Maeda, Atsuhiko1 (AUTHOR), Oshima, Naoto2 (AUTHOR), Motomura, Taisei3 (AUTHOR), Matsumae, Takashi1 (AUTHOR), Watanabe, Mitsuhiro2 (AUTHOR), Takagi, Hideki1 (AUTHOR)
Zdroj: Sensors (14248220). Jun2024, Vol. 24 Issue 12, p4000. 8p.
Databáze: Academic Search Ultimate
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