Dielectric films in microelectronics,.
| Typ dokumentu: | Kniha |
|---|---|
| Jazyk: |
angličtina |
| Vydavatel: |
Springfield :
U.S. Department of Commerce,
1965.
|
| Edice: |
A review of selected U.S. Government research and development reports ;
OTRT 117 |
|
|