Ultra Clean Processing of Semiconductor Surfaces XI

Autor:	Paul Mertens, Marc Meuris, Marc Heyns
Předmět:	Electrical engineering--Congresses, Semiconductors--Surfaces--Congresses
Kategorie:	TECHNOLOGY & ENGINEERING / Materials Science / General
Popis:	Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
Databáze:	eBook Collection (EBSCOhost)
Externí odkaz:	Zobrazit plný text záznamu