High-Rate Epitaxial Growth of Silicon Using Electron Beam Evaporation at High Temperatures
| Autor: | Stange, Marit Synnøve Sæverud, Sunde, Tor Olav Løveng, Dahl-Hansen, Runar Plunnecke, Rajput, Kalpna, Graff, Joachim Seland, Belle, Branson Delano, Ulyashin, Alexander |
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| Databáze: | NORA (Norwegian Open Research Archive) |
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