Nanometer‐Scale Depth‐Resolved Atomic Layer Deposited SiO2 Thin Films Analyzed by Glow Discharge Optical Emission Spectroscopy

Autor:	Zhu, Zhen, Modanese, Chiara, Sippola, Perttu, Di Sabatino Lundberg, Marisa, Savin, Hele
Databáze:	NORA (Norwegian Open Research Archive)
Externí odkaz:	http://hdl.handle.net/11250/2609750 Zobrazit plný text záznamu