In-situ studies of multicrystalline silicon nucleation and growth on alpha- and beta-Si3N4 coated substrates

Autor: Undheim, Espen, Maeda, Kensaku, Arnberg, Lars, Holmestad, Randi, Fujiwara, Kozo, Di Sabatino Lundberg, Marisa
Databáze: NORA (Norwegian Open Research Archive)