Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source

Autor:	Sønsteby, Henrik Hovde, Killi, Veronica Anne-Line Kathrine, Rykkje, Linn Margrethe, Bickford, Justin R., Martin, Eric G., Hoffman, Robert C., Nilsen, Ola
Zdroj:	Sønsteby, Henrik Hovde Killi, Veronica Anne-Line Kathrine Rykkje, Linn Margrethe Bickford, Justin R. Martin, Eric G. Hoffman, Robert C. Nilsen, Ola . Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source. Dalton Transactions. 2022, 51(3), 927-934 Dalton Transactions
Databáze:	NORA (Norwegian Open Research Archive)
Externí odkaz:	http://hdl.handle.net/10852/95561 https://www.duo.uio.no/bitstream/handle/10852/95561/1/d1dt03960a.pdf Zobrazit plný text záznamu