Effect of Subcycle Arrangement on Direct Epitaxy in ALD of LaNiO3

Autor: Sønsteby, Henrik Hovde, Skaar, Erik, Fjellvåg, Helmer, Nilsen, Ola
Zdroj: Sønsteby, Henrik Hovde Skaar, Erik Fjellvåg, Helmer Nilsen, Ola . Effect of Subcycle Arrangement on Direct Epitaxy in ALD of LaNiO3. ACS Applied Electronic Materials. 2021, 3(1), 292-298
ACS Applied Electronic Materials
Databáze: NORA (Norwegian Open Research Archive)