Effect of Subcycle Arrangement on Direct Epitaxy in ALD of LaNiO3
Autor: | Sønsteby, Henrik Hovde, Skaar, Erik, Fjellvåg, Helmer, Nilsen, Ola |
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Zdroj: | Sønsteby, Henrik Hovde Skaar, Erik Fjellvåg, Helmer Nilsen, Ola . Effect of Subcycle Arrangement on Direct Epitaxy in ALD of LaNiO3. ACS Applied Electronic Materials. 2021, 3(1), 292-298 ACS Applied Electronic Materials |
Databáze: | NORA (Norwegian Open Research Archive) |
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