Tunable Focused X-rays For Patterning and Lithography

Autor: Leontowich, Adam F.G.
Rok vydání: 2012
Předmět:
Druh dokumentu: Dissertation
Popis: Scanning transmission x-ray microscopes (STXM) focus monochromatic x-rays into an intense sub-30 nm diameter spot. Samples are then positioned at the focal plane and raster scanned through the spot while the transmitted x-rays are acquired to build up images at x-ray photon energies. In addition, x-ray absorption spectroscopy (XAS) can be performed by recording image sequences over a photon energy range of interest. STXMs excel at characterizing thin sections of inhomogeneous soft matter with their combination of high spatial
Doctor of Philosophy (PhD)
Databáze: Networked Digital Library of Theses & Dissertations