Tunable Focused X-rays For Patterning and Lithography
Autor: | Leontowich, Adam F.G. |
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Rok vydání: | 2012 |
Předmět: | |
Druh dokumentu: | Dissertation |
Popis: | Scanning transmission x-ray microscopes (STXM) focus monochromatic x-rays into an intense sub-30 nm diameter spot. Samples are then positioned at the focal plane and raster scanned through the spot while the transmitted x-rays are acquired to build up images at x-ray photon energies. In addition, x-ray absorption spectroscopy (XAS) can be performed by recording image sequences over a photon energy range of interest. STXMs excel at characterizing thin sections of inhomogeneous soft matter with their combination of high spatial Doctor of Philosophy (PhD) |
Databáze: | Networked Digital Library of Theses & Dissertations |
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