Measurements of thickness and parallelism using a low-coherent interferometer with anti-vibration capability
| Autor: | LIN, CHING-YAO, 林淨堯 |
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| Rok vydání: | 2019 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 107 This research proposed the use of an innovative interferometer for more precise block detection and measurement. The innovative interferometer exhibited advantages in none-distortion and in anti-vibration interference. Its architecture was composed of a light source module, a phase modulation module, a fiber optic module, and an interferometric module. The innovative interferometer was able to achieve inspections using two measurement modes: First, the phase-scanning measurement mode; and, second, the phase-shifting mode. The first, which adopted a broad-band light source, detected gauge block thickness based on the extreme intensity identification method; whereas, the second, which employed a narrow band light source, examined gauge block parallelism by using the five-step phase shift principle. This interferometer proved its advantage in non-distortion because its beam was not angularly oscillated during the phase-scanning measurement mode; and, therefore, the measurement result was not distorted. The interferometer’s anti-vibration interference was also verified because the working platform was a common light path. In order to understand the concept of this research, a set of the interferometers was setup to measure the gauge block thicknesses of 6000μm, 1900μm, and 1030μm. This research introduced the configuration, measurement theory, experimental setup, experiment procedure, and experimental results of the proposed interferometer. The results of measurement demonstrated the application and importance of the innovative interferometer. The study results showed that the innovative interferometer produced a standard deviation reaching up to 0.006μm in thickness measurement and a standard deviation reaching up to 0.002μm in parallel measurement. In addition, this innovative interferometer architecture was used to conduct experimental comparisons with the traditional Mikeson interferometer. The results of this study strongly suggest the superiority of the innovative interferometer’s application and utility to avoid distortion and anti-vibration interference. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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