Novel Micro Scanning with Integrated Atomic Force Microscope and Confocal Laser Scanning Microscope
| Autor: | Meng-Hao Chou, 周孟皓 |
|---|---|
| Rok vydání: | 2018 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 107 Atomic force microscope (AFM) is a powerful technology that has ability to sketch the 3D topography of the sample in nanoscale resolution. On the other hand, confocal laser scanning microscope (CLSM) is a non-destructive optical inspection system in sub-micro resolution and widely used in three-dimensional profile of biological samples and engineering material. However, both of them have their own long-standing shortcomings. AFM suffers from a lower scanning speed and smaller scanning range. The resolution of the CLSM cannot reach nanometer level due to the optical diffraction. In order to overcome these limitations, many researches dedicated to the integration of AFM and CLSM so to achieve high-speed, large-range and high-precision scanning. However, there is an upcoming problems when AFM and CLSM are combined together. The scanning time in AFM is great more than that in CLSM. For micro-size scanning range, AFM takes several minutes to tens of minutes to scan while CLSM only takes tens of seconds. In addition, if the coordinates of the two microscopes are not correctly calibrated, the relative position of two microscopes cannot be accurately obtained, which may cause alignment problems. In this thesis, we design a hybrid microscope which combines AFM, CLSM and a long travel range positioning stage (LTRPS) and develop a novel cooperative fast algorithm to achieve high-speed, large-range and high-precision scan. First, the calibration of the microscopes will be implemented. Next, CLSM starts a large range scan first and then define the region of interesting (ROI) by edge detection. Next, the scan regions of the AFM are arranged based on the ROI and adaptive scanning region method is proposed to reduce the scanning time. Next, apply variable speed scanning to increase the AFM scanning speed. Finally, we compare sample features to build a fast, large-range, high-precision 3D scan image. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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