Average Power Handling Capability on SiON thin film and Preparation of Bionics Particle Screening Biochip
| Autor: | Ya-Chuan Liu, 劉雅琄 |
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| Rok vydání: | 2019 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 107 We proposed the effects of average power-handling capability (APHC) on silicon-oxy-nitride (SiON) thin film by using very high-frequency plasma-enhanced chemical vapor deposition (VHF PECVD). The proposed coplanar waveguide (CPW) thin film line is fabricated on the ceramic substrate. The use of SiON thin film surface passivation layer on the ceramic substrate is effective to investigate the average power-handling capability of the proposed thin film structure. The effects of different thickness of thin films from 300 to 700 nm on the CPW line have been analyzed and discussed. The measured microwave properties are comprising of conductor loss αc (f), dielectric loss αd (f), effective permittivity (εeff)) and average power-handling capability. This proposed silicon-oxy-nitride (SiON) thin film passivation iii layer can be applied to the application of low-temperature co-fired ceramic (LTCC) techniques. The second part of this paper is the development of biomimetic particle screening wafers. It was found in the previous study that the film deposited by very high-frequency plasma-enhanced chemical vapor deposition (PECVD) deposition system is of excellent quality and thus continues to be applied to biochips. Ultra-high-frequency plasma-assisted chemical vapor deposition system is used to deposit the photosensitive layer on the wafer to investigate whether the efficiency of screening particles is improved. In addition, we will analyze and discuss whether the design of the light pattern will affect the screening results. This experiment verified that the thin film deposited by very high-frequency plasma-enhanced chemical vapor deposition (PECVD) system can not only effectively improve the efficiency of biochip screening, but also affect the sorting results. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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