Effect of Al Content on Optical properties and Electrical properties of CrAlN thin films
| Autor: | LI, YU-RU, 李昱儒 |
|---|---|
| Rok vydání: | 2018 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 106 CrN have excellent wear resistance, high hardness, thermal stability, good conductivity and oxidation resistance, and is used widely in cutting tools, protective and wear-resistant coating. The addition of Al in CrN can effectively improve the antioxidant property and high-temperature stability of CrN. Most of the reports related to Cr1-XAlXN are confined to mechanical properties and only a few reports related to the optical and electrical properties of CrAlN have been found. In this study, Cr1-XAlXN thin films with different Al contents were prepared by reactive magnetron sputtering. Effects of the Al content on the optical and electrical properties of Cr1-XAlXN were investigated. The transmittance and reflectance of Cr1-XAlXN were measured by using the UV/VIS/NIR. The optical energy gap was calculated from the absorptance by using the energy gap equation. The refractive indexes and extinction coefficient of CrN and Cr1-XAlXN films were obtained by using an ellipsometer. The chemical composition and structure of the studied films were characterized by using the FE-SEM, EDS and GIXRD .The Hall Effect Analyzer and Four-point probe were used to measure the electrical properties of Cr1-XAlXN films. The transmittance increased.The energy gap increased, and the surface morphology changed from the pyramid-like into smooth state when the Al content of Cr1-XAlXN was increased. Increasing the Al content increased the dielectric property of Cr1-XAlXN. Cr1-XAlXN was held at 300-600 °C for 2 hours under vacuum and atmospheric conditions, and its morphology and structure did not change significantly. Compared with CrN, it had excellent oxidation resistance. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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