Siliconwire based Optical Coupling Analysis in Design and Process
| Autor: | Chi-Ting Lin, 林紀廷 |
|---|---|
| Rok vydání: | 2018 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 106 In this thesis, silicon-on-insulator (SOI) substrates are designed and simulated to make photonic devices. Because of the high refractive index contrast, the SOI based optical waveguides footprint can be significantly reduced besides widely used in high-speed and low-power electronic components in recent years. Moreover, the silicon photonic process is compatible with a complementary metal oxide semiconductor fabrication, which will benefit to the high-density optoelectronic integrated circuits (OEIC) development. Due to the coupling difficulty between the traditional fiber mode and sub-micron siliconwire based photonic components, there are two approaches explored in this thesis - Nanotaper and grating coupler. The nanotaper coupling efficiency, 89% (-0.5dB), can be demonstrated at 40-μm tip length and 0.12-μm width using the cross-value simulation and modal verification through the commercial softwares of OmniSim's Finite Difference Time Domain (FDTD) and FIMMWAVE's Finite Difference Method (FDM). The grating coupling efficiency is about 50% (-3dB) on average. Furthermore, the nanotaper mode will be utilized for the surface plasmon biosensing. All the components are processed in the National Nano Device Laboratories (NDL). The differences between the I-line stepper and the Leica electron-beam lithography will be further discussed. The experimental results show that the electron beam writing system can resolve 0.1-μm waveguide width and 0.35-μm for the I-line stepper exposure. Finally, the grating coupler is successfully fabricated and the single-ended minimum coupling efficiency is about 6% (-12dB), which may come from the factors of the sidewall roughness, cladding layer quality, and coupling angle. Compared with the conventional 3-μm adiabatic taper coupler, the grating coupling efficiency is significantly improved . |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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