Mechanical Properties and Oxidation Resistance of Ti–Si–N Coatings
| Autor: | Lin, Nai-Yuan, 林乃元 |
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| Rok vydání: | 2018 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 106 Ti–Si–N coatings were fabricated using reactive direct current magnetron cosputtering. Fixed titanium target power and changes silicon power. The Ti–Si–N coatings with Si contents of 3–16 at. % exhibited crystalline, whereas the Ti–Si–N coatings with Si contents of 20 and 23 at. % were near-amorphous. The Ti31Si16N53 coatings exhibited maximum mechanical property levels, including a nanoindentation hardness of 19.2 GPa and a Young’s modulus of 247 GPa. The oxidation resistance of the Ti–Si–N coatings was evaluated through annealing at 600 ℃ in a 1%O2–99%Ar atmosphere. The Ti–Si–N coatings showed good oxidation resistance. High silicon content coatings. Rutile TiO2 formed in the early stage of oxidation, however, the reflection intensity of X-ray diffraction decreased in further annealing. To explore the stability in glass molding procrsses, thermal cycles annealing, involving annealing at 270 ℃ to 600 ℃ and maintaining at 600 ℃ ± 10 ℃ hold for 1 min. The coatings withstands continuous temperature changes over 500 cycles. In this study, transmission electron microscopy and X-ray photoelectron spectroscopy were applied to investigate the evolution of nanostructure and bonding characteristics of the annealed Ti–Si–N coatings. Keywords: Annealing, Mechanical properties, Oxidation, Transmission electron microscopy; X-ray photoelectron spectroscopy |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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