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Autor: Tsung-Yi Kuo, 郭宗義
Rok vydání: 2018
Druh dokumentu: 學位論文 ; thesis
Popis: 106
In recent years, the electronic components have been oriented towards light and thin development with the advancement of science and technology, When the components are thin to a nanoscale, they get with flexibility, which has become one of the important developed goals. We attempt to fabricate zero-dimensional and one-dimensional nanostructures in combination with anodized aluminum template technology in order to enhance the performance of the flexible electronic component. The variety of techniques have been developed for the fabrication of thin anodic aluminum oxide template, such as the PMMA template-based method, the electron beam lithography method, and the nanoimprint template method. However, those methods are difficult to use in a wide range of applications, due to the cumbersome and the time-consuming steps, the inability of ion-lithography to fabricate large-area regular-ordered anodic aluminum oxide and the high cost of preparing nanoimprinted template. In this study, we propose a method of nanosphere lithography and fabricate the thin anodic aluminum oxide template on the flexible substrate. We have successfully prepared regular ordered and collimated thin anodized aluminum oxide template with an area of approximately 1 x 1 cm2 by pre-imprinting and one-step anodizing.
Databáze: Networked Digital Library of Theses & Dissertations