Design and analysis of a micro-positioning decoupling stage
| Autor: | Chen-Yang Hung, 洪晨陽 |
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| Rok vydání: | 2018 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 106 The purpose of this research is trying to design of a micro-positioning decoupling stage. Explore displacement and coupling of micro-precision positioning stage.The micro-positioning stage is a monolithic mechanism and use flexure hinge and piezoelectric actuator. This research is divided into the following four step : (1) conceptural design, (2) the optimum design of hinge and modal type analyzing, (3) control system establishing,and (4) experiment verifying. A conceptual design for the positioning stage is conducted according to functional requirements verification in the first beginning. Then the optimum design of size and sensitivity analysis. Mathematical model of this stage is developed,and followed by finite element analysis.Finally,experiments are conducted to verify the design.The hysteresis model design of piezoelectric and PID control. Reduce hysteresis effect and hence affects the tracking error. The actual dimension of the positioning stage is 80 mm×80 mm×9 mm. From the experiment results,it shows that the stage can achieve a maximum displacement of 1.21 μm in X axis；3.562 μm in Y axis；and 12.156 μm in Z axis.The stage can also achieve a maximum rotation of 52.399 arcsec around X axis；24.339 arcsec around Y axis and 5.3914 arcsec around Z axis. Finally,with closed loop control,the bias has improved more than 50%(from 113 nm to 56 nm ). |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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